Crossmark

Ultraflat hexagonal boron nitride for high-κ dielectric integration

Crossref DOI link: https://doi.org/10.1038/s41563-024-02013-9

Published Online: 2024-10-29

Published Print: 2024-11

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Ko, Hayoung https://orcid.org/0000-0002-1404-9572
Lee, Seungjin https://orcid.org/0000-0003-2222-0429
Kim, Ki Kang https://orcid.org/0000-0003-1008-6744
License Information

Text and Data Mining valid from 2024-10-29

Version of Record valid from 2024-10-29
More Information

Article History

First Online: 29 October 2024

Competing interests

: The authors declare no competing interests.