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Two-dimensional hard masks push three-dimensional patterning

Crossref DOI link: https://doi.org/10.1038/s41563-026-02571-0

Published Online: 2026-04-16

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Chang, Jihoon

Lee, Chul-Ho https://orcid.org/0000-0003-1570-8688
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Text and Data Mining valid from 2026-04-16

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Article History

First Online: 16 April 2026

Competing interests

: The authors declare no competing interests.