Liu, Yang http://orcid.org/0000-0002-0508-1474
Qiu, Zheru http://orcid.org/0000-0002-6465-026X
Ji, Xinru
Bancora, Andrea http://orcid.org/0000-0001-6254-6146
Lihachev, Grigory
Riemensberger, Johann http://orcid.org/0000-0002-3468-6501
Wang, Rui Ning http://orcid.org/0000-0002-5704-3971
Voloshin, Andrey
Kippenberg, Tobias J. http://orcid.org/0000-0002-3408-886X
Funding for this research was provided by:
United States Department of Defense | United States Air Force | AFMC | Air Force Office of Scientific Research (FA9550-19-1-0250)
United States Department of Defense | Defense Advanced Research Projects Agency (W911NF2120248)
EC | Horizon 2020 Framework Programme (898594)
Schweizerischer Nationalfonds zur Förderung der Wissenschaftlichen Forschung (221540)
Article History
Received: 15 February 2023
Accepted: 15 April 2024
First Online: 10 June 2024
Competing interests
: T.J.K. is a co-founder and shareholder of LiGenTec SA, a start-up company offering Si<sub>3</sub>N<sub>4</sub> photonic integrated circuits as a foundry service. T.J.K. is a founder and shareholder of EDWATEC SA, a start-up company offering Er-doped photonic integrated circuits. The other authors declare no competing interests.