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High-power AlGaN deep-ultraviolet micro-light-emitting diode displays for maskless photolithography

Crossref DOI link: https://doi.org/10.1038/s41566-024-01551-7

Published Online: 2024-10-15

Published Print: 2025-01

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Feng, Feng https://orcid.org/0000-0003-0020-4129
Liu, Yibo https://orcid.org/0000-0002-3474-3908
Zhang, Ke

Yang, Hang

Hyun, Byung-Ryool https://orcid.org/0000-0002-4303-9453
Xu, Ke https://orcid.org/0000-0002-7605-7674
Kwok, Hoi-Sing

Liu, Zhaojun https://orcid.org/0000-0002-7746-2786
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Text and Data Mining valid from 2024-10-15

Version of Record valid from 2024-10-15
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Article History

Received: 18 April 2023

Accepted: 12 September 2024

First Online: 15 October 2024

Competing interests

: The authors declare no competing interests.