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Authors
Liu, Junqiu http://orcid.org/0000-0003-2405-6028
Tian, Hao
Lucas, Erwan
Raja, Arslan S.
Lihachev, Grigory
Wang, Rui Ning http://orcid.org/0000-0002-5704-3971
He, Jijun
Liu, Tianyi
Anderson, Miles H.
Weng, Wenle http://orcid.org/0000-0003-2628-5174
Bhave, Sunil A. http://orcid.org/0000-0001-7193-2241
Kippenberg, Tobias J. http://orcid.org/0000-0002-3408-886X
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Article History
Received: 27 January 2020
Accepted: 2 April 2020
First Online: 15 July 2020
Competing interests
: T.J.K. is a co-founder and shareholder of LiGenTec SA, a start-up company that is engaged in making Si<sub>3</sub>N<sub>4</sub> nonlinear photonic chips available via foundry service.
