Riemensberger, Johann http://orcid.org/0000-0002-3468-6501
Kuznetsov, Nikolai http://orcid.org/0000-0002-5609-5331
Liu, Junqiu http://orcid.org/0000-0003-2405-6028
He, Jijun
Wang, Rui Ning http://orcid.org/0000-0002-5704-3971
Kippenberg, Tobias J. http://orcid.org/0000-0002-3408-886X
Article History
Received: 21 July 2021
Accepted: 7 September 2022
First Online: 30 November 2022
Competing interests
: T.J.K. is a cofounder and shareholder of LiGenTec SA, a company that is engaged in making Si<sub>3</sub>N<sub>4</sub> nonlinear photonic chips available through foundry service.