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Authors
Snigirev, Viacheslav
Riedhauser, Annina
Lihachev, Grigory
Churaev, Mikhail
Riemensberger, Johann https://orcid.org/0000-0002-3468-6501
Wang, Rui Ning https://orcid.org/0000-0002-5704-3971
Siddharth, Anat https://orcid.org/0000-0003-4066-7304
Huang, Guanhao https://orcid.org/0000-0001-7803-804X
Möhl, Charles https://orcid.org/0000-0003-3483-4700
Popoff, Youri
Drechsler, Ute
Caimi, Daniele
Hönl, Simon
Liu, Junqiu https://orcid.org/0000-0003-2405-6028
Seidler, Paul https://orcid.org/0000-0002-1084-4640
Kippenberg, Tobias J. https://orcid.org/0000-0002-3408-886X
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Article History
Received: 8 October 2021
Accepted: 11 January 2023
First Online: 15 March 2023
Competing interests
: T.J.K. is a co-founder and shareholder of LiGenTec SA, a foundry commercializing Si<sub>3</sub>N<sub>4</sub> photonic integrated circuits, as well as DEEPLIGHT SA, a start-up commercializing Si<sub>3</sub>N<sub>4</sub> photonic integrated circuits-based frequency-agile, low-noise lasers.
