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Authors
Ji, Xinru https://orcid.org/0000-0001-7057-7786
Li, Xurong
Qiu, Zheru https://orcid.org/0000-0002-6465-026X
Wang, Rui Ning
Divall, Marta
Gelash, Andrey
Lihachev, Grigory
Kippenberg, Tobias J. https://orcid.org/0000-0002-3408-886X
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Article History
Received: 23 April 2025
Accepted: 5 September 2025
First Online: 22 October 2025
Competing interests
: T.J.K. is a cofounder and shareholder of LiGenTec SA, a start-up company offering Si 3 N 4 PICs as a foundry service.
