Lam, Bao https://orcid.org/0009-0000-4491-4638
Yu, Yung Man https://orcid.org/0009-0006-4441-9323
Nam, Hyunjun https://orcid.org/0000-0002-3816-2174
Ni, Hsu-Chih https://orcid.org/0000-0002-8243-9783
Chatterjee, Shomik
Rakheja, Shaloo
Zuo, Jian-Min https://orcid.org/0000-0002-5151-3370
Cao, Qing https://orcid.org/0000-0002-5844-2376
Article History
Received: 9 June 2025
Accepted: 7 April 2026
First Online: 27 May 2026
Competing interests
: Q.C., B.L., Y.M.Y. and H.N. are inventors on a pending patent application titled ‘Methods of producing and transfer printing a silicon membrane and method of fabricating a monolithic three-dimensional silicon chip’ (application no. US 19/436,203), which was submitted by the Board of Trustees of the University of Illinois to United States Patent and Trademark Office on 12/30/2025. The other authors declare no competing interests.