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Electron heating in rf capacitive discharges at atmospheric-to-subatmospheric pressures

Crossref DOI link: https://doi.org/10.1038/s41598-018-27945-6

Published Online: 2018-07-05

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Park, Sanghoo https://orcid.org/0000-0002-4180-7455
Choe, Wonho https://orcid.org/0000-0002-8952-8252
Kim, Holak
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Text and Data Mining valid from 2018-07-05

Version of Record valid from 2018-07-05
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Article History

Received: 21 November 2017

Accepted: 12 June 2018

First Online: 5 July 2018

Competing Interests

: The authors declare no competing interests.