Crossmark

Fabrication of buried nanostructures by atomic layer deposition

Published Online: 2018-10-10

Authors

Ali, Rizwan

Saleem, Muhammad Rizwan

Roussey, Matthieu

Turunen, Jari

Honkanen, Seppo
License Information

Text and Data Mining valid from 2018-10-10

Version of Record valid from 2018-10-10
More Information

Article History

Received: 7 March 2018

Accepted: 20 September 2018

First Online: 10 October 2018

Competing Interests

: The authors declare no competing interests.

Document is current