Nanoscale modification of silicon and germanium surfaces exposed to low-energy helium plasma
Crossref DOI link: https://doi.org/10.1038/s41598-019-46541-w
Published Online: 2019-07-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Thompson, Matt
Magyar, Luke
Corr, Cormac
Text and Data Mining valid from 2019-07-12
Version of Record valid from 2019-07-12
Article History
Received: 30 January 2019
Accepted: 25 June 2019
First Online: 12 July 2019
Competing Interests
: The authors declare no competing interests.