Real-time Optical Dimensional Metrology via Diffractometry for Nanofabrication
Crossref DOI link: https://doi.org/10.1038/s41598-020-61975-3
Published Online: 2020-03-25
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Whitworth, Guy L.
Francone, Achille
Sotomayor-Torres, Clivia M.
Kehagias, Nikolaos
Text and Data Mining valid from 2020-03-25
Version of Record valid from 2020-03-25
Article History
Received: 18 October 2019
Accepted: 27 January 2020
First Online: 25 March 2020
Competing interests
: The authors declare no competing interests.