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The impact of focused ion beam induced damage on scanning spreading resistance microscopy measurements

Published Online: 2020-09-10

Authors

Pandey, Komal

Paredis, Kristof

Hantschel, Thomas

Drijbooms, Chris

Vandervorst, Wilfried
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Text and Data Mining valid from 2020-09-10

Version of Record valid from 2020-09-10
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Article History

Received: 5 March 2020

Accepted: 15 June 2020

First Online: 10 September 2020

Competing interests

: The authors declare no competing interests.

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