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Aluminum doped zinc oxide deposited by atomic layer deposition and its applications to micro/nano devices

Published Online: 2021-01-13

Authors

Van Toan, Nguyen

Tuoi, Truong Thi Kim

Inomata, Naoki

Toda, Masaya

Ono, Takahito
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Text and Data Mining valid from 2021-01-13

Version of Record valid from 2021-01-13
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Article History

Received: 23 June 2020

Accepted: 28 December 2020

First Online: 13 January 2021

Competing interests

: The authors declare no competing interests.

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