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Microvalve array fabrication using selective PDMS (polydimethylsiloxane) bonding through Perfluorooctyl-trichlorosilane passivation for long-term space exploration

Crossref DOI link: https://doi.org/10.1038/s41598-022-16574-9

Published Online: 2022-07-20

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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