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Authors
Yu, Jicheng
Long, Zhaozhi
Liang, Siyuan
Yue, Changxi
Yin, Xiaodong
Zhou, Feng
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Funding
Funding for this research was provided by:
National Key Research and Development Program of China (2021YFB3201800)
State Grid Corporation of China Science and Technology Project: High Sensitivity MEMS magnetic sensing elements and sensors
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Article History
Received: 28 September 2022
Accepted: 22 December 2022
First Online: 5 January 2023
Competing interests
: The authors declare no competing interests.
