A fluid model of pulsed direct current planar magnetron discharge
Crossref DOI link: https://doi.org/10.1038/s41598-023-36231-z
Published Online: 2023-06-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Tran, Si Bui Quang
Leong, Fong Yew
Hariharaputran, Ramanarayan
Le, Duc Vinh
Text and Data Mining valid from 2023-06-03
Version of Record valid from 2023-06-03
Article History
Received: 15 March 2023
Accepted: 31 May 2023
First Online: 3 June 2023
Competing interests
: The authors declare no competing interests.