Stacked SiGe nanosheets p-FET for Sub-3 nm logic applications
Crossref DOI link: https://doi.org/10.1038/s41598-023-36614-2
Published Online: 2023-06-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Chu, Chun-Lin
Hsu, Shu-Han
Chang, Wei-Yuan
Luo, Guang-Li
Chen, Szu-Hung
Text and Data Mining valid from 2023-06-09
Version of Record valid from 2023-06-09
Article History
Received: 2 March 2023
Accepted: 7 June 2023
First Online: 9 June 2023
Competing interests
: The authors declare no competing interests.