Refining silicon nitride waveguide quality through femtosecond laser annealing
Crossref DOI link: https://doi.org/10.1038/s41598-024-66707-5
Published Online: 2024-07-08
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Wang, Pei-Hsun
Chen, Chien-Hung
Hou, Nien-Lin
Cao, Jia-Hao
Zheng, He-Yuan
Chen, Hung-Wen
Text and Data Mining valid from 2024-07-08
Version of Record valid from 2024-07-08
Article History
Received: 9 October 2023
Accepted: 3 July 2024
First Online: 8 July 2024
Competing interests
: The authors declare no competing interests.