In–situ strain control in epitaxial silicon carbide compound semiconductor
Crossref DOI link: https://doi.org/10.1038/s41598-024-80810-7
Published Online: 2024-12-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Jazizadeh, Behzad
Myronov, Maksym
Text and Data Mining valid from 2024-12-05
Version of Record valid from 2024-12-05
Article History
Received: 18 June 2024
Accepted: 21 November 2024
First Online: 5 December 2024
Declarations
:
: The authors declare no competing interests.