Document is current

Any future updates will be listed below

Effect of post-metallization anneal on monolithic co-integration of Hf0.5Zr0.5O2-based FeFET and CMOS

Crossref DOI link: https://doi.org/10.1038/s41598-025-02281-8

Published Online: 2025-05-18

Update policy: https://doi.org/10.1007/springer_crossmark_policy

About CrossMark