Experimental study of inductively coupled plasma etching of patterned single crystal diamonds
Crossref DOI link: https://doi.org/10.1038/s41598-025-08066-3
Published Online: 2025-07-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Zhao, Lei
Wang, Xiangbing
Jiang, Nan
Nishimura, Kazhihito
Yi, Jian
Fang, Shuangquan
Text and Data Mining valid from 2025-07-01
Version of Record valid from 2025-07-01
Article History
Received: 23 April 2025
Accepted: 18 June 2025
First Online: 1 July 2025
Declarations
:
: The authors declare no competing interests.