Mixed Co-Mn oxide coatings synthetized by DLI-MOCVD for SOC interconnect a parametric study for composition and homogeneity control
Crossref DOI link: https://doi.org/10.1038/s41598-025-23783-5
Published Online: 2025-11-14
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Chanson, R.
Miserque, F.
Schuster, F.
Rouillard, F.
Text and Data Mining valid from 2025-11-14
Version of Record valid from 2025-11-14
Article History
Received: 23 July 2025
Accepted: 8 October 2025
First Online: 14 November 2025
Declarations
:
: The authors declare no competing interests.