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First-principles calculations reveal precursor-dependent reaction mechanisms in ZrO2 atomic layer deposition

Published Online: 2026-04-16

Authors

Kim, Yunseok

Vu, Mai Phuong Uyen

Kim, Ho Jun

Park, Hwanyeol
Funding

Funding for this research was provided by:

Soonchunhyang University

Korea Institute for Advancement of Technology (RS-2025-02263458)

Ministry of Trade, Industry and Energy (RS-2025-25458147)
License Information

Text and Data Mining valid from 2026-04-16

Accepted Manuscript valid from 2026-04-16
More Information

Article History

Received: 13 January 2026

Accepted: 6 April 2026

First Online: 16 April 2026

Declarations

:

: The authors declare no competing interests.

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