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Wang, Sung-Tsun

Li, Kai-Wei

Weng, Tzu-Ting

Chang, Yu-Cheng

Chung, Chia-Chen

Lo, Chia-Hung

Chen, Shih-Chieh

Ahmed, Tanveer

Chen, Ciao-Fen

Chang, Chan-Yuen

Lo, Shun-Tsung

Lin, Yen-Fu

Hung, Terry Y. T.

Cheng, Chao-Ching

Radu, Iuliana P.

Chueh, Yu-Lun

Lien, Der-Hsien

Funding for this research was provided by:

ational Science and Technology Council, Taiwan (Grant No. NSTC 113-2112-M-007 -034 -MY3, 114-2119-M-007 -015 -MBK, 114-2628-E-007-001)

National Science and Technology Council (Grant No. NSTC 114-2112-M-A49-013)

NSTC T-Star Center Project: Future Semiconductor Technology Research Center (NSTC 114-2634-F-A49-001)

MOE in Taiwan (Yushan Scholar Program)

Taiwan Semiconductor Manufacturing Company

Text and Data Mining valid from 2026-03-26

Accepted Manuscript valid from 2026-03-26