Building 3D integrated circuits with electronics and photonics
Crossref DOI link: https://doi.org/10.1038/s41928-024-01187-z
Published Online: 2024-06-27
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Xiang, Chao http://orcid.org/0000-0002-7081-0346
Bowers, John E.
Text and Data Mining valid from 2024-06-27
Version of Record valid from 2024-06-27
Article History
First Online: 27 June 2024
Competing interests
: The authors declare no competing interests.