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Steps to integrating 2D transistors into the back-end of line

Crossref DOI link: https://doi.org/10.1038/s41928-025-01522-y

Published Online: 2025-12-05

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Zhang, Peigen

Tian, He https://orcid.org/0000-0001-7328-2182
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Text and Data Mining valid from 2025-12-05

Version of Record valid from 2025-12-05
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Article History

First Online: 5 December 2025

Competing interests

: The authors declare no competing interests.