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Atomistic insights into EUV photoresist photolysis via full temporal dynamics

Crossref DOI link: https://doi.org/10.1038/s42004-026-02035-1

Published Online: 2026-04-27

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Li, Yi https://orcid.org/0009-0004-8360-7891
Kang, Dongdong https://orcid.org/0000-0002-2986-5927
Han, Jinsen https://orcid.org/0000-0002-9121-4324
Dai, Jiayu https://orcid.org/0000-0001-7423-7500
Wang, Linwang https://orcid.org/0000-0001-7061-2692
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Text and Data Mining valid from 2026-04-27

Accepted Manuscript valid from 2026-04-27
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Article History

Received: 14 September 2025

Accepted: 10 April 2026

First Online: 27 April 2026

Competing interests

: The authors declare no competing interests.