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Authors
Dion, Guillaume https://orcid.org/0000-0002-2160-401X
Tessier-Poirier, Albert https://orcid.org/0000-0001-6960-6359
Chiasson-Poirier, Laurent
Morissette, Jean-François https://orcid.org/0000-0003-0042-0999
Brassard, Guillaume
Haman, Anthony
Turcot, Katia
Sylvestre, Julien https://orcid.org/0000-0002-9390-7052
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Article History
Received: 13 September 2023
Accepted: 5 March 2024
First Online: 16 March 2024
Competing interests
: The authors declare the following competing interests: a patent application was filed by Guillaume Dion and Julien Sylvestre for the MEMS technology used in this paper (WO/2020/124219). The other authors declare no competing interests.
