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Authors
Liu, Zhenming https://orcid.org/0000-0001-5196-035X
Long, Yaoyao
Wehner, Charlotte
Wen, Haoran
Ayazi, Farrokh
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Funding
Funding for this research was provided by:
United States Department of Defense | United States Army | U.S. Army Research, Development and Engineering Command | Army Research Laboratory (W911NF-22-2-0050)
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Article History
Received: 8 October 2023
Accepted: 18 June 2024
First Online: 25 June 2024
Competing interests
: Z.L., H.W. and F.A. are partially or fully associated with StethX Microsystems Inc., a company interested in commercializing silicon carbide-based micro-electro-mechanical system devices.
