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A polymer-based MEMS loudspeaker featuring a partially stiffened membrane actuated by a PZT thin film

Crossref DOI link: https://doi.org/10.1038/s44172-025-00438-x

Published Online: 2025-05-29

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Liechti, Romain https://orcid.org/0000-0002-3178-5168
Dieppedale, Christel https://orcid.org/0000-0003-3373-1494
Rotrou, Timothée

Le Rhun, Gwenaël
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Text and Data Mining valid from 2025-05-29

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Article History

Received: 7 February 2025

Accepted: 16 May 2025

First Online: 29 May 2025

Competing interests

: The authors declare no competing interests.