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Unlocking net-zero in semiconductor manufacturing

Crossref DOI link: https://doi.org/10.1038/s44287-024-00062-5

Published Online: 2024-05-29

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Nikolka, Mark

Göke, Sebastian

Burkacky, Ondrej

Spiller, Peter

Patel, Mark
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Text and Data Mining valid from 2024-05-29

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Article History

First Online: 29 May 2024

Competing interests

: The authors declare no competing interests.