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CMOS compatible high-Q photonic crystal nanocavity fabricated with photolithography on silicon photonic platform

Published Online: 2015-06-18

Authors

Ooka, Yuta

Tetsumoto, Tomohiro

Fushimi, Akihiro

Yoshiki, Wataru

Tanabe, Takasumi
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Text and Data Mining valid from 2015-06-18

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Article History

Received: 11 February 2015

Accepted: 19 May 2015

First Online: 18 June 2015

Competing interests

: The authors declare no competing financial interests.

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