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Controllable high-throughput high-quality femtosecond laser-enhanced chemical etching by temporal pulse shaping based on electron density control

Published Online: 2015-08-26

Authors

Zhao, Mengjiao

Hu, Jie

Jiang, Lan

Zhang, Kaihu

Liu, Pengjun

Lu, Yongfeng
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Text and Data Mining valid from 2015-08-26

Version of Record valid from 2015-08-26
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Article History

Received: 30 March 2015

Accepted: 10 July 2015

First Online: 26 August 2015

Competing interests

: The authors declare no competing financial interests.

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