A novel approach of high speed scratching on silicon wafers at nanoscale depths of cut
Crossref DOI link: https://doi.org/10.1038/srep16395
Published Online: 2015-11-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Zhang, Zhenyu
Guo, Dongming
Wang, Bo
Kang, Renke
Zhang, Bi
Text and Data Mining valid from 2015-11-09
Version of Record valid from 2015-11-09
Article History
Received: 26 May 2015
Accepted: 9 October 2015
First Online: 9 November 2015
Competing interests
: The authors declare no competing financial interests.