Electrolithography- A New and Versatile Process for Nano Patterning
Crossref DOI link: https://doi.org/10.1038/srep17753
Published Online: 2015-12-04
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Talukder, Santanu
Kumar, Praveen
Pratap, Rudra
Text and Data Mining valid from 2015-12-04
Version of Record valid from 2015-12-04
Article History
Received: 25 August 2015
Accepted: 2 November 2015
First Online: 4 December 2015
Competing interests
: The authors declare no competing financial interests.