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Suspended Solid-state Membranes on Glass Chips with Sub 1-pF Capacitance for Biomolecule Sensing Applications

Published Online: 2015-12-08

Authors

Balan, Adrian

Chien, Chen-Chi

Engelke, Rebecca

Drndić, Marija
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Text and Data Mining valid from 2015-12-08

Version of Record valid from 2015-12-08
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Article History

Received: 27 September 2015

Accepted: 4 November 2015

First Online: 8 December 2015

Competing interests

: The authors declare no competing financial interests.

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