Hydrogen-plasma-induced Rapid, Low-Temperature Crystallization of μm-thick a-Si:H Films
Crossref DOI link: https://doi.org/10.1038/srep32716
Published Online: 2016-09-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Zhou, H. P.
Xu, M.
Xu, S.
Liu, L. L.
Liu, C. X.
Kwek, L. C.
Xu, L. X.
Text and Data Mining valid from 2016-09-07
Version of Record valid from 2016-09-07
Article History
Received: 21 April 2016
Accepted: 11 August 2016
First Online: 7 September 2016
Competing interests
: The authors declare no competing financial interests.