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Nanoscale solely amorphous layer in silicon wafers induced by a newly developed diamond wheel

Published Online: 2016-10-13

Authors

Zhang, Zhenyu

Guo, Liangchao

Cui, Junfeng

Wang, Bo

Kang, Renke

Guo, Dongming
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Text and Data Mining valid from 2016-10-13

Version of Record valid from 2016-10-13
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Article History

Received: 28 May 2016

Accepted: 27 September 2016

First Online: 13 October 2016

Competing interests

: The authors declare no competing financial interests.

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