Effect of magnetron sputtering parameters and stress state of W film precursors on WSe2 layer texture by rapid selenization
Crossref DOI link: https://doi.org/10.1038/srep36451
Published Online: 2016-11-04
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Li, Hongchao
Gao, Di
Xie, Senlin
Zou, Jianpeng
Text and Data Mining valid from 2016-11-04
Version of Record valid from 2016-11-04
Article History
Received: 6 July 2016
Accepted: 14 October 2016
First Online: 4 November 2016
Competing interests
: The authors declare no competing financial interests.