Electron-beam lithography for polymer bioMEMS with submicron features
Crossref DOI link: https://doi.org/10.1038/micronano.2016.53
Published Online: 2016-11-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Scholten, Kee
Meng, Ellis
Text and Data Mining valid from 2016-11-07
Version of Record valid from 2016-11-07
Article History
Received: 30 March 2016
Revised: 22 June 2016
Accepted: 15 July 2016
First Online: 7 November 2016
Competing interests
: The authors declare no conflict of interest.