Resonant pitch and roll silicon gyroscopes with sub-micron-gap slanted electrodes: Breaking the barrier toward high-performance monolithic inertial measurement units
Crossref DOI link: https://doi.org/10.1038/micronano.2016.92
Published Online: 2017-04-24
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Wen, Haoran http://orcid.org/0000-0003-4691-701X
Daruwalla, Anosh
Ayazi, Farrokh
Text and Data Mining valid from 2017-04-24
Version of Record valid from 2017-04-24
Article History
Received: 26 September 2016
Revised: 25 November 2016
Accepted: 29 November 2016
First Online: 24 April 2017
Competing interests
: The authors declare no conflict of interest.