Nanoimprint lithography steppers for volume fabrication of leading-edge semiconductor integrated circuits
Crossref DOI link: https://doi.org/10.1038/micronano.2017.75
Published Online: 2017-09-25
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Sreenivasan, S.V.
Text and Data Mining valid from 2017-09-25
Version of Record valid from 2017-09-25
Article History
Received: 30 April 2017
Revised: 7 September 2017
Accepted: 11 September 2017
First Online: 25 September 2017
Competing interests
: Canon is commercializing nanoimprint lithography steppers.