Cracking-assisted photolithography for mixed-scale patterning and nanofluidic applications
Crossref DOI link: https://doi.org/10.1038/ncomms7247
Published Online: 2015-02-18
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kim, Minseok
Ha, Dogyeong
Kim, Taesung
Text and Data Mining valid from 2015-02-18
Version of Record valid from 2015-02-18
Article History
Received: 24 July 2014
Accepted: 8 January 2015
First Online: 18 February 2015
Competing interests
: The authors declare no competing financial interests.