Gatterdam, Volker
Frutiger, Andreas
Stengele, Klaus-Peter
Heindl, Dieter
Lübbers, Thomas
Vörös, Janos
Fattinger, Christof
Article History
Received: 13 January 2017
Accepted: 11 July 2017
First Online: 25 September 2017
Change Date: 25 October 2017
Change Type: Correction
Change Details: In the version of this Article originally published, the illumination pattern below the phase mask was incorrectly positioned in Fig. 1b (ii) and Zeptosens was misspelled in two instances in Methods. These errors have been corrected in all versions of the Article.
Change Date: 11 February 2021
Change Type: Correction
Change Details: A Correction to this paper has been published:
Change Details: https://doi.org/10.1038/s41565-021-00863-x
Competing interests
: The authors declare no competing financial interests.