Post-CMOS processing challenges and design developments of CMOS-MEMS microheaters for local CNT synthesis
Crossref DOI link: https://doi.org/10.1038/s41378-023-00598-w
Published Online: 2023-11-06
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Roy, Avisek http://orcid.org/0000-0002-2538-7315
Ta, Bao Q.
Azadmehr, Mehdi
Aasmundtveit, Knut E.
Text and Data Mining valid from 2023-11-06
Version of Record valid from 2023-11-06
Article History
Received: 30 March 2023
Revised: 31 July 2023
Accepted: 16 August 2023
First Online: 6 November 2023
Conflict of interest
: The authors declare no competing interests.