Lukashchuk, Anton http://orcid.org/0000-0001-5151-7059
Riemensberger, Johann http://orcid.org/0000-0002-3468-6501
Karpov, Maxim http://orcid.org/0000-0002-9304-3936
Liu, Junqiu http://orcid.org/0000-0003-2405-6028
Kippenberg, Tobias J. http://orcid.org/0000-0002-3408-886X
Article History
Received: 14 October 2021
Accepted: 5 May 2022
First Online: 7 June 2022
Competing interests
: T.J.K. is a co-founder and shareholder of LiGenTec SA, a start-up company that is engaged in making Si<sub>3</sub>N<sub>4</sub> nonlinear photonic chips available via foundry service.