Anderson, Miles H.
Weng, Wenle http://orcid.org/0000-0003-2628-5174
Lihachev, Grigory
Tikan, Alexey
Liu, Junqiu http://orcid.org/0000-0003-2405-6028
Kippenberg, Tobias J. http://orcid.org/0000-0002-3408-886X
Funding for this research was provided by:
United States Department of Defense | Defense Advanced Research Projects Agency (D18AC00032)
Schweizerischer Nationalfonds zur Förderung der Wissenschaftlichen Forschung (192293)
United States Department of Defense | United States Air Force | AFMC | Air Force Office of Scientific Research (FA9550-19-1-0250)
Article History
Received: 24 March 2021
Accepted: 8 July 2022
First Online: 13 August 2022
Competing interests
: T.J.K. is a co-founder and shareholder of LiGenTec SA, a start-up company that is engaged in making Si<sub>3</sub>N<sub>4</sub> nonlinear photonic chips available via foundry service.