Churaev, Mikhail http://orcid.org/0000-0002-1864-3288
Wang, Rui Ning http://orcid.org/0000-0002-5704-3971
Riedhauser, Annina
Snigirev, Viacheslav
Blésin, Terence http://orcid.org/0000-0003-3468-5493
Möhl, Charles http://orcid.org/0000-0003-3483-4700
Anderson, Miles H.
Siddharth, Anat http://orcid.org/0000-0003-4066-7304
Popoff, Youri
Drechsler, Ute
Caimi, Daniele
Hönl, Simon http://orcid.org/0000-0003-4093-0520
Riemensberger, Johann http://orcid.org/0000-0002-3468-6501
Liu, Junqiu
Seidler, Paul http://orcid.org/0000-0002-1084-4640
Kippenberg, Tobias J. http://orcid.org/0000-0002-3408-886X
Funding for this research was provided by:
United States Department of Defense | Defense Advanced Research Projects Agency (HR0011-20-2-0046)
Article History
Received: 19 October 2022
Accepted: 17 May 2023
First Online: 13 June 2023
Competing interests
: T.J.K. is a co-founder and shareholder of LiGenTec SA and Luxtelligence SA, start-up companies engaged in making Si<sub>3</sub>N<sub>4</sub> and LiNbO<sub>3</sub> photonic chips available via foundry service. Other authors declare no competing interests.